Description

Graphite boat, made of isostatic graphite, is a plasma-enhanced chemical vapor deposition (PECVD) tube furnace, which is used to deposit silicon nitride film on the surface of silicon wafer by plasma-enhanced chemical vapor deposition (PECVD) process.

The graphite boat made of fine grain isostatic pressed graphite has the characteristics of good conductivity, good thermal conductivity, low impurity content, strong oxidation resistance, fast cooling, fast heating, etc.

Graphite for Graphite Boats

Isostatic Pressing Graphite for Graphite Boats in photovoltaic industry

graphite blocks produced by SHJ graphite factory is widely used in the photovoltaic industry due to its excellent properties. The graphite boat made from isostatic graphite maintains the same resistivity at all points even under long working conditions, ensuring a reliable and uniform current distribution. It also effectively slows down the oxidation of the graphite boat, which extends its service life greatly.

Given the photovoltaic industry’s requirement for high-purity graphite materials, we also offer purification services: We can reduce the ash content of custom graphite products to below 2PPM while enhancing the purity of machined graphite parts to 5-50 ppm.